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Cited article:

Effect of Substrate Temperature on (Micro/Nano)Structure of a-SiC:H Thin Films Deposited by Radio-Frequency Magnetron Sputtering.

Mohsen Daouahi and Najeh Rekik
The Journal of Physical Chemistry C 116 (39) 21018 (2012)
https://doi.org/10.1021/jp3079937