Articles citing this article

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Cited article:

Defect evolution in ultralow energy, high dose helium implants of silicon performed at elevated temperatures

K. Haynes, X. Hu, B. D. Wirth, C. Hatem and K. S. Jones
Journal of Applied Physics 124 (16) (2018)
https://doi.org/10.1063/1.5046096

Effect of voids-controlled vacancy supersaturations on B diffusion

O. Marcelot, A. Claverie, F. Cristiano, et al.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 257 (1-2) 249 (2007)
https://doi.org/10.1016/j.nimb.2007.01.236