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Cited article:

Simple and Low Cost Patterning Process for Sputtered Pb(Zr,Ti)O3 Thin Films and Electrodes for Membrane-Based Microsystems Applications

Cyril Millon, Christophe Malhaire, Emmanuel Defaÿ and Daniel Barbier
MRS Proceedings 657 (2000)
https://doi.org/10.1557/PROC-657-EE5.29