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Cited article:

Bias voltage effect on magnetron sputtered titanium aluminum nitride TiAlN thin films properties

Zouina Amina Ait-Djafer, Nadia Saoula, Daniel Wamwangi, Noureddine Madaoui, Hamid Aknouche

Eur. Phys. J. Appl. Phys., 86 3 (2019) 30301

Published online: 2019-07-30

DOI: https://doi.org/10.1051/epjap/2019180344

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The Effect of Substrate Duty Cycle on the Mechanical and Electrochemical Properties of TiAlN Coatings Deposited by Cathodic Arc Evaporation

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Variation on the Microstructure and Mechanical Properties of Ti-Al-N Films Induced by RF-ICP Ion Source Enhanced Reactive Nitrogen Plasma Atmosphere

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