Articles citing this article

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Cited article:

Analytical calculation of site and surface reaction probabilities of SiH_x radicals in PECVD process

Oumelkheir Babahani, Fethi Khelfaoui, Mohammed Tayeb Meftah

Eur. Phys. J. Appl. Phys., 62 1 (2013) 10301

Published online: 2013-03-20

DOI: https://doi.org/10.1051/epjap/2013120345

This article has been cited by the following article(s):

Theory, Application, and Implementation of Monte Carlo Method in Science and Technology

Fethi Khelfaoui and Oumelkheir Babahani
Theory, Application, and Implementation of Monte Carlo Method in Science and Technology (2019)
https://doi.org/10.5772/intechopen.88559

Monte Carlo Simulation of Chemical Reactions in Plasma Enhanced Chemical Vapor Deposition: from Microscopic View to Macroscopic Results

O. Babahani, S. Hadjadj, F. Khelfaoui, H. O. Kebaili and S. Lemkeddem
Silicon 11 (3) 1267 (2019)
https://doi.org/10.1007/s12633-018-9916-y