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Cited article:

Influence of Fe in the buffer layer on the laser lift-off of AlGaN/GaN HEMT film: phenomena and mechanism

Fen Guo, Quan Wang, Hongling Xiao, et al.
Semiconductor Science and Technology 35 (9) 095024 (2020)
https://doi.org/10.1088/1361-6641/ab9d33