Free Access
Eur. Phys. J. Appl. Phys.
Volume 51, Number 2, August 2010
Article Number 20101
Number of page(s) 8
Section Review Article
Published online 07 July 2010
  1. R.S. Shawgo, A.C.R. Grayson, Y. Li, M.J. Cima, Curr. Opin. Solid State Mater. Sci. 6, 329 (2002) [CrossRef] [Google Scholar]
  2. M.M. Teymoori, E. Abbaspour-Sani, Sens. Actuat. A: Phys. 117, 222 (2004) [Google Scholar]
  3. A. Nisar, N. Afzulpurkar, B. Mahaisavariya, A. Tuantranont, Sens. Actuat. B: Chem. 130, 917 (2008) [Google Scholar]
  4. B.D. Iverson, S.V. Garimella, V. Singhal, Electron. Cooling 12, 28 (2006) [Google Scholar]
  5. A.V. Lemoff, A.P. Lee, Sens. Actuat. B: Chem. 63, 178 (2000) [Google Scholar]
  6. X. Wang, S. Wang, B. Gendhar, C. Cheng, C.K. Byun, G. Li, M. Zhao, S. Liu, Trends Anal. Chem. 28, 64 (2009) [CrossRef] [Google Scholar]
  7. J. Darabi, H. Wang, J. Microelectromech. Syst. 14, 747 (2005) [CrossRef] [Google Scholar]
  8. H. Takao, K. Miyamura, H. Ebi, M. Ashiki, K. Sawada, K. Ishida, Sens. Actuat. A 119, 468 (2005) [CrossRef] [Google Scholar]
  9. J.C. Galas, V. Studer, Y. Chen, Microelectron. Eng. 78-79, 112 (2005) [CrossRef] [Google Scholar]
  10. R. Luharuka, S. LeBlanc, J.S. Bintoro, Y.H. Berthelot, P.J. Hesketh, Sens. Actuat. A: Phys. 143, 399 (2008) [CrossRef] [Google Scholar]
  11. D. Bosch, B. Heimhofer, G. Mück, H. Seidel, U. Thumser, W. Welser, Sens. Actuat. A: Phys. 37-38, 684 (1993) [CrossRef] [Google Scholar]
  12. D. Laser, J.G. Santiago, J. Micromech. Microeng. 14, R35 (2004) [Google Scholar]
  13. Chih-Ming Ho, Micro/Nano Technology Systems for Biomedical Applications: Microfluidics, Optics, and Surface Chemistry (Oxford University Press, USA, 2010) [Google Scholar]
  14. F.M. White, Fluid Mechanics, in McGraw-Hill Series in Mechanical Engineering, 4th edn. (McGraw-Hill, New York, 2001) [Google Scholar]
  15. P. Woias, Proc. SPIE 4560, 39 (2001) [CrossRef] [Google Scholar]
  16. B. Wang, X. Chu, E. Li, L. Li, Ultrasonics 44, 643 (2006) [CrossRef] [Google Scholar]
  17. Q. Cui, C. Liu, X.F. Zha, Microfluid. Nanofluid. 3, 377 (2007) [CrossRef] [Google Scholar]
  18. N.T. Nguyen, S.T. Wereley, Fundamentals and Applications of Microfluidics (Arten House, Boston, 2006) [Google Scholar]
  19. Y.H. Mu, N.P. Hung, K.A. Ngoi, Int. J. Adv. Manuf. Technol. 15, 573 (1999) [CrossRef] [Google Scholar]
  20. P.L. Reece, Progress in Smart Materials and Structures, edited by T. Kundu (NOVA Science Publishers Inc., New York, 2004) [Google Scholar]
  21. T. Zhang, Q.-M. Wang, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53, 463 (2006) [CrossRef] [PubMed] [Google Scholar]
  22. I. Ederer, P. Raetsch, W. Schullerus, C. Tille, U. Zech, Sens. Actuat. A 62, 752 (1997) [CrossRef] [Google Scholar]
  23. H. Andersson, W. van der Wijngaart, P. Nilsson, P. Enoksson, G. Stemme, Sens. Actuat. B 72, 259 (2001) [CrossRef] [Google Scholar]
  24. Q. Cui, C. Liu, X.F. Zha, Int. J. Adv. Manuf. Technol. 36, 516 (2008) [CrossRef] [Google Scholar]
  25. I. Izzo, D. Accoto, A. Menciassi et al., Sens. Actuat. A: Phys. 133, 128 (2007) [Google Scholar]
  26. T. Gerlach, H. Wurmus, Sens. Actuat. A: Phys. 50, 135 (1995) [Google Scholar]
  27. C. Yih-Lin, L. Jiang-Hong, J. Mater. Process. Technol. 192-193, 229 (2007) [CrossRef] [Google Scholar]
  28. D. Accoto, M. Carrozza, P. Dario, J. Micromech. Microeng. 10, 277 (2000) [CrossRef] [Google Scholar]
  29. H.K. Ma, B.R. Hou, H.Y. Wu, C.Y. Lin, J.J. Gao, M.C. Kou, Development and application of a diaphragm micro-pump with piezoelectric device, in Symp. on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP, Stresa, Lago Maggiore, Italy, 2007, pp. 273–278 [Google Scholar]
  30. J. Kan, Z. Yang, T. Peng et al., Sens. Actuat. A: Phys. 121, 156 (2005) [CrossRef] [Google Scholar]
  31. J.H. Park, K. Yoshida, S. Yokoto, J. Mechatron. 9, 687 (1999) [CrossRef] [Google Scholar]
  32. G.H. Feng, E.S. Kim, J. Microelectromech. Syst. 14, 699 (2005) [CrossRef] [Google Scholar]
  33. B. Li, Q.F. Chen, D.G. Lee, J. Woolman, G.P. Carman, Sens. Actuat. A 117, 325 (2005) [Google Scholar]
  34. N.T. Nguyen, T.Q. Truong, Sens. Actuat. B 97, 137 (2004) [Google Scholar]
  35. M. Richter, R. Linnemann, P. Woias, Sens. Actuat. 68, 480 (1998) [CrossRef] [Google Scholar]
  36. A. Doll, M. Heinrichs, F. Goldschmidtboeing, H.-J. Schrag, U.T. Hopt, P. Woias, Sens. Actuat. A: Phys. 130-131, Selected Papers from Transducers'05, The 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, June 2005 and August 2006, pp. 445–453 [Google Scholar]
  37. D.S. Lee, J.S. Ko, Y.T. Kim, Thin Solid Films 486, 285 (2004) [Google Scholar]
  38. L.-S. Jang, Y.-J. Li, S.-J. Lin et al., Microfluid. Nanofluid. 9, 185 (2007) [Google Scholar]
  39. L.-S. Jang, Y.-C. Yu, Microsyst. Technol. 14, 241 (2008) [CrossRef] [Google Scholar]
  40. I. Kanno, T. Suzuki, H. Hata, H. Shintaku, S. Kawano, H. Kotera, Development and characterization of a traveling wave micro-pump driven by piezoelectric actuators, in The 2nd Int. Symp. on Micro & Nano Technology (ISMNT-2), Hsinchu, Taiwan, 2006, pp. 226–229 [Google Scholar]
  41. B. Cohen, U.S. Patent No. 5961298 (1999) [Google Scholar]
  42. Z. Wan, D. Wu, D. Cruz, A. Lazarev, Piezoelectric Micropump for Drug Delivery (2001), online publication [Google Scholar]

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