Edge-Detected 4DSTEM - effective low-dose diffraction data acquisition method for nanopowder samples in an SEM instrument | The European Physical Journal Applied Physics (EPJ AP)

Special Issue on ‘Imaging, Diffraction, and Spectroscopy on the micro/nanoscale (EMC 2024)’, edited by Jakob Birkedal Wagner and Randi Holmestad

Open Access

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Estimation of transmission thickness limit at 30 keV accelerating voltage on STO lamella: a) TEM overview image with line profile for EELS thickness measurement, b) TEM EELS thickness profile of STO lamella, c) 4DSTEM virtual bright field image of STO lamella taken at 30 keV in SEM, d) Diffraction example at 120 nm thickness position of EELS line profile showing that even at 120 nm a reasonable quality diffraction can be obtained.

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