Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin films | The European Physical Journal Applied Physics (EPJ AP)

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Fig. 5

FTIR spectra of the thin films deposited for Φ_HMDS = 250, 500 and 1000 μL min⁻¹ and = 15 L min⁻¹. Zoom was done in the 700–1700 cm⁻¹ range.

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