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Fig. 3
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(a) Evolution of the thin film thickness d and Rq as a function of the precursor flow rate for 
= 15 L min−1. 5 μm × 5 μm AFM surface topography mapping for 
= 15 L min−1 and (b) ΦHMDS = 250 μL min−1 (c) ΦHMDS = 500 μL min−1 and (d) ΦHMDS = 1000 μL min−1.
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