Original Article

Temperature control of atomic gas chamber using a nonmagnetic heating chip fabricated on quartz substrate

¹ Hubei Key Laboratory of Intelligent Wireless Communication, College of Electronics and Information Engineering, South-Central Minzu University, Wuhan 430074, PR China
² Hubei Engineering Research Center for Intelligent Internet of Things, College of Electronics and Information Engineering, South-Central Minzu University, Wuhan 430074, PR China
³ 1st weak magnetic measurement station of NDM, The No. 710 Research Institute of China Shipbuilding Industry Corporation, Yichang 443001, PR China

^* e-mail: 2019057@mail.scuec.edu.cn

Received: 24 August 2023
Accepted: 19 January 2024
Published online: 16 April 2024

Abstract

Nonmagnetic electrical heating and temperature sensing chip fabricated on quartz substrate is developed, and a high-precision digital temperature control system is designed based on this chip. The heating resistance and temperature sensing resistance are prepared by depositing two layers of Ti/Pt alloy electrodes on quartz substrate through magnetic field cancellation design. The temperature coefficient of fabricated Ti/Pt temperature sensing resistance is +0.197%/℃. The simulation results show that the residual magnetic field generated by the heating current in the atomic gas chamber closely adjacent to the chip is less than 0.1 nT. Temperature control in the range of 100~150 ℃ is realized, and the temperature stability is about 0.02 ℃. Due to the high light transmittance of quartz glass, this heating chip has significant advantages for optical integration and miniaturization of atomic magnetometers.