Eur. Phys. J. Appl. Phys.
Volume 97, 2022
|Number of page(s)||8|
|Section||Plasma, Discharges and Processes|
|Published online||08 March 2022|
Experimental investigation of hybrid plasma reactor for duplex surface treatment
Centre de Développement des Technologies Avancées (CDTA), Laboratoire des Plasmas et ses Applications, Cité 20 Août 1956 B.P.17 Baba Hassan, Alger, Algérie
* e-mail: email@example.com
Received in final form: 2 January 2022
Accepted: 31 January 2022
Published online: 8 March 2022
This work investigates a hybrid plasma reactor designed for duplex surface treatment. This reactor consists of the combination of two plasma sources: namely, an inductive plasma source, for the activation of the surface by nitriding, and a magnetron cathode, for the deposition of titanium layer. Electrostatic probes and a Retarding Field Energy Analyzer probe (RFEA) are used to characterize plasma parameters such as ion density, electron temperature, plasma potential, ion current density, and the Ion Energy Distribution Function (IEDF). These parameters are monitored as a function of the injected radiofrequency power and the gas pressure. Our results show that these electrical parameters vary according to the parameters of the discharge. This characterization allows us to identify the optimal conditions for the targeted application and to ensure the reproducibility of thin film properties when moving from a research plasma reactor to an industrial one.
© EDP Sciences, 2022
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.