Issue |
Eur. Phys. J. Appl. Phys.
Volume 69, Number 1, January 2015
|
|
---|---|---|
Article Number | 10302 | |
Number of page(s) | 7 | |
Section | Thin Films | |
DOI | https://doi.org/10.1051/epjap/2014140278 | |
Published online | 27 January 2015 |
https://doi.org/10.1051/epjap/2014140278
Trapped thickness-shear modes in a contoured, partially electroded AT-cut quartz resonator
1
School of Chemical Engineering and Energy, Zhengzhou University, Zhengzhou
450001, P.R. China
2
School of Mechanical Engineering, Zhengzhou University, Zhengzhou
450001, P.R. China
3
Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln
NE 68588-0526, USA
a e-mail: jyang1@unl.edu
Received:
6
July
2014
Revised:
20
December
2014
Accepted:
24
December
2014
Published online:
27
January
2015
We perform a theoretical analysis of a contoured crystal plate resonator with nonuniform thickness. The resonator is made from AT-cut quartz and is partially electroded in the central region. Based on the variational formulation established in a previous paper and the Ritz method with trigonometric functions as basis functions, free vibration resonant frequencies and thickness-shear modes trapped in the central electroded region are obtained. The effect of the curvature of the contour is examined. It is also found that the classical frequency prediction given by Tiersten et al. in 1996 from an approximate analysis has an inaccuracy of the order of 40 parts per million for the fundamental mode, significant in resonator design and application.
© EDP Sciences, 2015
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.