Eur. Phys. J. Appl. Phys.
Volume 61, Number 2, February 2013
Topical issue: 13th International Symposium on High Pressure Low Temperature Plasma Chemistry (Hakone XIII). Edited by Nicolas Gherardi, Henryca Danuta Stryczewska and Yvan Ségui
|Number of page(s)||7|
|Section||Plasma, Discharges and Processes|
|Published online||15 February 2013|
Formations of negative ions in Sf6/N2 mixtures and their transport at atmospheric pressure *
Department of Experimental Physics, Comenius University, Mlynska dolina F2, 84248 Bratislava, Slovakia
2 Graduate School, Chiba Institute of Technology, Tsudanuma, Narashino, Chiba 275-0016, Japan
a e-mail: firstname.lastname@example.org
Revised: 26 November 2012
Accepted: 10 December 2012
Published online: 15 February 2013
Formation of negative ions initiated by interaction of thermal electrons and in the corona discharge (CD) in N2 with small admixture of SF6; was studied using the ion mobility spectrometry- orthogonal acceleration time-of-flight mass spectrometry (IMS-oaTOF) at atmospheric pressure. The negative ions have been analyzed by the ion mobility spectrometry and mass spectrometry (IMS-MS) and two-dimensional spectra (2D IMS-MS) have been recorded. We discuss the mechanisms of the negative ion formation in the N2/SF6 mixtures (0.003-0.018%) as well as the transport parameters of the ions in these mixtures. The values of the reduced ion mobilities of negative ions formed in these mixtures were determined (2.43 cm2/V s for HF2– (HF)n, 2.32 cm2/V s for NO3– (HF)n, 2.08 cm2/V s for SF5–, 2.01 cm2/V s for SOF5–, 2.00 for SOF4– 1.99 cm2/V s for SF6–, 1.83 cm2/V s for SOF5–(H2O)n and 1.73 for SOF5–(H2O)n(HF)m). The assignment of the ion mobility peaks was performed on the basis of the 2D IMS-MS spectra.
© EDP Sciences, 2013
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