Eur. Phys. J. Appl. Phys.
Volume 60, Number 1, October 2012
|Number of page(s)||5|
|Section||Nanomaterials and Nanotechnologies|
|Published online||05 November 2012|
Swift heavy ion-induced silicon dioxide nanostructuration: experimental observation of velocity effect
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
2 CNES, 31410 Toulouse, France
a e-mail: firstname.lastname@example.org
Revised: 21 September 2012
Accepted: 2 October 2012
Published online: 5 November 2012
Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.
© EDP Sciences, 2012
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