| Issue |
Eur. Phys. J. Appl. Phys.
Volume 59, Number 1, July 2012
|
|
|---|---|---|
| Article Number | 11301 | |
| Number of page(s) | 4 | |
| Section | Surfaces and Interfaces | |
| DOI | https://doi.org/10.1051/epjap/2012120068 | |
| Published online | 16 July 2012 | |
https://doi.org/10.1051/epjap/2012120068
The waveguide method for measuring parameters of the surface layers
Department of Radiophysics, People’s Friendship University of Russia, 6 Miklukho-Maklaya str., 117198 Moscow, Russia
a e-mail: danstaser@mail.ru
A new method has been applied for determining the mean square deviation of surface roughness and the imaginary part of permittivity of the material near-surface region. The method is based on the scattering and absorption of light in waveguide systems of integrated optics. It has high sensitivity and ease of implementation. The advantages of the proposed method are confirmed experimentally.
© EDP Sciences, 2012
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.