Eur. Phys. J. Appl. Phys.
Volume 58, Number 3, June 2012
|Number of page(s)||5|
|Section||Plasma, Discharges and Processes|
|Published online||05 July 2012|
Examination of an ICP magnesium plasma by spectroscopy and double Langmuir probe measurements
PlasmAIX for Plasma Research, Heimerik 47, 2440 Geel, Belgium
a e-mail: Karel.email@example.com
Revised: 27 February 2012
Accepted: 24 May 2012
Published online: 5 July 2012
Optical emission spectroscopy and double Langmuir probe measurements are performed on a magnesium plasma from an inductively coupled plasma source. These measurements are performed in order to examine their feasibility to characterize the plasma, its degree of ionization and its deviation from thermal equilibrium.
© EDP Sciences, 2012
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