In situ diagnostic of etch plasmas for process control using quantum cascade laser absorption spectroscopy

¹ Leibniz Institute for Plasma Science and Technology Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany
² Qimonda Dresden, Königsbrücker Str. 180, 01099 Dresden, Germany

Corresponding author: lang@inp-greifswald.de

Received: 30 June 2009
Revised: 18 September 2009
Accepted: 6 November 2009
Published online: 11 December 2009

Abstract

The combination of quantum cascade lasers and infra red absorption spectroscopy (QCLAS) opens up new possibilities for plasma process monitoring and control. First measurements are reported with an especially designed quantum cascade laser arrangement for application in semiconductor industrial environments to track the approach for in situ process control in silicon etch plasmas. In gas mixtures with N₂ and in microwave (MW) plasmas at pressures below 30 Pa concentrations of C₄F₆ and of SiF₄ were measured simultaneously online for the first time. It could be demonstrated, that using quantum cascade lasers (QCL) it is possible to control ex situ mass flow controllers (MFC) based on in situ measured species concentrations in the gas phase and in the MW plasma bulk.