Eur. Phys. J. Appl. Phys.
Volume 49, Number 1, January 2010
Focus on Plasma Processes
|Number of page(s)||4|
|Section||Focus on Plasma Processes|
|Published online||26 November 2009|
Fluid modeling of a microwave micro-plasma at atmospheric pressure
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, 1049-001 Lisboa, Portugal
2 Laboratoire de Physique des Gaz et des Plasmas, Université Paris-Sud/CNRS, 91405 Orsay, France
Corresponding author: firstname.lastname@example.org
Accepted: 2 October 2009
Published online: 26 November 2009
This paper presents the modeling of an argon micro-plasma produced by microwaves (2.45 GHz) at atmospheric pressure. The study uses a one-dimensional stationary fluid-type code that solves the transport equations for electrons, positive ions Ar+ and Ar+2, and the electron mean energy, together with Poisson's equation for the space-charge electrostatic field, Maxwell's equations for the electromagnetic excitation field and the gas thermal energy equation. The model uses a simple kinetic scheme for Ar that includes the ground state, an excited state representing the lumped 4s levels, and two ionization states associated to the atomic and the molecular ions. The ions are assumed to be in thermal equilibrium with the neutral gas, having the same temperature profile.
PACS: 52.50.Dg – Plasma sources / 52.80.Pi – High-frequency and RF discharges / 52.65.Kj – Magnetohydrodynamic and fluid equation
© EDP Sciences, 2009
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