Eur. Phys. J. Appl. Phys.
Volume 47, Number 2, August 200911th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)
|Number of page(s)||4|
|Section||11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)|
|Published online||17 April 2009|
Electron beam induced light emission
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
2 Coherent GmbH, Zielstatt-Str. 32, 81379 München, Germany
Corresponding author: email@example.com
Accepted: 21 January 2009
Published online: 17 April 2009
Electron beams with a particle energy of typically 12 keV are used for collisional excitation of dense gases. The electrons are sent through ceramic membranes of only 300 nm thickness into gas targets. Excimer light emission from the pure rare gases and from gas mixtures are studied for the development of brilliant VUV and UV light sources. The application of the technology for gas kinetic studies is described and its potential for building very small electron beam pumped lasers is discussed.
PACS: 42.55.Lt – Gas lasers including excimer and metal-vapor lasers / 34.50.Fa – Electronic excitation and ionization of atoms / 33.20.Ni – Vacuum ultraviolet spectra
© EDP Sciences, 2009
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