Eur. Phys. J. Appl. Phys.
Volume 47, Number 1, July 2009
4th Colloquium Interdisciplinary in Instrumentation (C2I 2007)
|Number of page(s)||5|
|Published online||22 April 2009|
PANI/ZnO/Quartz structure for Love wave gas sensor
IJL/P2M, Nancy University, Vandœuvre-lès-Nancy, France
2 LPCI, Université du Maine, Le Mans, France
Corresponding author: firstname.lastname@example.org
Accepted: 19 January 2009
Published online: 22 April 2009
Everyone knows the importance of sensors in our society and the huge attempt to improve their properties in order to obtain better sensitivity and selectivity. In this paper, we are more particularly focused on gas sensors based on surface acoustic waves (SAW) device. In a previous work, we have developed and studied a structure composed of a 90° rotated ST quartz crystal covered with a ZnO layer. By developing inter-digital transducers (IDT) on this structure, we can generate different types of acoustic waves. Love waves which are confined near the surface are known to be very sensitives to fluids (liquids or gases). The aim of this work is to present the way we have developed this optimal structure and to test it with a specific polymer. This polymer is polyaniline (PANI). Its main advantage is that it should be deposited by cold pulsed plasma process.
PACS: 43.35.Ns – Acoustical properties of thin films / 43.38.Fx – Piezoelectric and ferroelectric transducers / 82.35.Lr – Physical properties of polymers
© EDP Sciences, 2009
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