Issue |
Eur. Phys. J. Appl. Phys.
Volume 46, Number 2, May 2009
|
|
---|---|---|
Article Number | 21001 | |
Number of page(s) | 10 | |
Section | Plasma, Discharges and Processes | |
DOI | https://doi.org/10.1051/epjap/2009049 | |
Published online | 08 April 2009 |
https://doi.org/10.1051/epjap/2009049
Modeling of an axial injection torch
1
Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Av. Rovisco Pais, 1049-001 Lisboa, Portugal
2
Centro de Física da Universidade do Minho, Universidade do Minho, 4710-057 Braga, Portugal
3
Departamento de Física, Universidad de Córdoba, Campus Universitario de Rabanales, Spain
Corresponding author: llalves@ist.utl.pt
Received:
26
August
2008
Revised:
27
November
2008
Accepted:
18
February
2009
Published online:
8
April
2009
This paper presents simulation results for a microwave (2.45 GHz) plasma reactor, operated by an axial injection torch (AIT). The study gives a two-dimensional description of the AIT-reactor system, based on an electromagnetic model (that solves Maxwell's equations adopting a time-harmonic description, yielding the distribution of the electromagnetic fields and the average power absorbed by the plasma), and a hydrodynamic model (that solves the Navier-Stokes' equations for the flowing neutral gas, yielding the distribution of mass density, pressure, temperature, and velocities). Comparison between model results and experimental measurements reveal common variation trends, with changes in the reactor height, for the power reflected by the system, and yield a qualitative agreement for the axial profile of the gas rotational temperature. Model results, such as the power transmission coefficient and the gas temperature, are particularly dependent on the reactor dimensions, the electron density and temperature, and the gas input flow, which indicates that simulations can be used to provide general guidelines for device optimization.
PACS: 52.75.Hn – Plasma torches / 52.50.Sw – Plasma heating by microwaves; ECR, LH, collisional heating / 52.30.-q – Plasma dynamics and flow
© EDP Sciences, 2009
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.