Eur. Phys. J. Appl. Phys.
Volume 42, Number 2, May 2008
|Page(s)||161 - 167|
|Section||Instrumentation and Metrology|
|Published online||28 March 2008|
Back-illuminated CCD for coherent soft X-ray imaging
SP2M, CEA Grenoble, 17 avenue des Martyrs, 38054 Grenoble Cedex, France
2 Magnetic Spectroscopy Group, Daresbury Laboratory, Warrington WA4 4AD, UK
3 Diamond Light Source Ltd, Chilton, Didcot OX11 0DE, UK
4 SIMaP, INPG-UJF, UMR CNRS 5266, BP 75, 38402 Saint Martin d'Hères, France
Corresponding author: firstname.lastname@example.org
Accepted: 31 January 2008
Published online: 28 March 2008
Direct-illumination CCDs find increasing use in coherent X-ray imaging due to their good spatial resolution and signal-to-noise ratio. These CCDs offer a high quantum efficiency for soft X-rays near the 3d transition metal L edges. We compare front- and back-illuminated CCDs and describe a method to obtain images with a large dynamic range (five orders of magnitude) and high spatial resolution. Back-illuminated CCDs are resistant to radiation damage at the soft X-ray energies and provide a true 13.5 μm pixel resolution. High quality diffraction images are obtained in magnetic studies from metallic multilayer structures in reflection geometry.
PACS: 07.85.Fv – X- and gamma-ray sources, mirrors, gratings, and detectors / 07.85.Qe – Synchrotron radiation instrumentation / 95.55.Aq – Charge-coupled devices, image detectors, and IR detector arrays / 42.25.Kb – Coherence
© EDP Sciences, 2008
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