Eur. Phys. J. Appl. Phys.
Volume 27, Number 1-3, July-September 2004Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X)
|Page(s)||385 - 388|
|Published online||15 July 2004|
Error analysis of Makyoh-topography surface height profile measurements
Hungarian Academy of Sciences, Research Institute for Technical
Physics and Materials Science, PO Box 49, H-1525 Budapest, Hungary
Corresponding author: email@example.com
Accepted: 18 December 2003
Published online: 15 July 2004
The errors of surface profile measurements using grid-illumination Makyoh topography is analysed using computer simulations. It is shown that two regions of imaging exists: at smooth surfaces and small screen-to-sample distances, the error is determined by the pixel reading error, while at less smooth surfaces and larger screen-to-sample distances, the errors of summation approximation dominates. The pixel reading error component can be decreased by increasing the screen-to-sample distance. It is demonstrated that the described evaluation algorithm gives maximum relative errors of roughly 1.5%.
PACS: 81.70.Fy – Nondestructive testing: optical methods / 42.15.Dp – Wave fronts and ray tracing / 42.87.-d – Optical testing techniques
© EDP Sciences, 2004
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