Eur. Phys. J. Appl. Phys.
Volume 27, Number 1-3, July-September 2004Tenth International Conference on Defects: Recognition, Imaging and Physics in Semiconductors (DRIP X)
|Page(s)||385 - 388|
|Published online||15 July 2004|
Error analysis of Makyoh-topography surface height profile measurements
Hungarian Academy of Sciences, Research Institute for Technical
Physics and Materials Science, PO Box 49, H-1525 Budapest, Hungary
Corresponding author: firstname.lastname@example.org
Accepted: 18 December 2003
Published online: 15 July 2004
The errors of surface profile measurements using grid-illumination Makyoh topography is analysed using computer simulations. It is shown that two regions of imaging exists: at smooth surfaces and small screen-to-sample distances, the error is determined by the pixel reading error, while at less smooth surfaces and larger screen-to-sample distances, the errors of summation approximation dominates. The pixel reading error component can be decreased by increasing the screen-to-sample distance. It is demonstrated that the described evaluation algorithm gives maximum relative errors of roughly 1.5%.
PACS: 81.70.Fy – Nondestructive testing: optical methods / 42.15.Dp – Wave fronts and ray tracing / 42.87.-d – Optical testing techniques
© EDP Sciences, 2004
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.