| Issue |
Eur. Phys. J. Appl. Phys.
Volume 26, Number 3, June 2004
14th International Colloquium on Plasma Processes (CIP 2003)
|
|
|---|---|---|
| Page(s) | 221 - 226 | |
| Section | Plasma, Discharges and Processes | |
| DOI | https://doi.org/10.1051/epjap:2004036 | |
| Published online | 11 May 2004 | |
https://doi.org/10.1051/epjap:2004036
Density of oxygen atoms in high pressure (10–50 torr) flowing microwave post-discharges for elastomer treatments
1
SME, Centre de recherches du Bouchet, rue Lavoisier, 91710 Vert Le
Petit, France
2
CPAT – UPS, 118 route de Narbonne, 31062 Toulouse Cedex, France
Corresponding author: h.blanchard@snpe.com
Received:
30
October
2003
Revised:
15
March
2004
Accepted:
30
March
2004
Published online:
11
May
2004
Results are presented on the production of oxygen atoms in flowing microwave post-discharges in a reactor of 5 litres at high pressures (10-50 torr). Diagnostics of O-atom densities are obtained by NO titration in the post-discharge. An hydrodynamic and kinetic model has been developed to obtain the spatial distribution of O-atoms inside the post-discharge reactor. Such post-discharge processes at high pressures are of interest for elastomer treatments.
PACS: 52.80.-s – Electric discharges / 52.70.Kz – Optical (ultraviolet, visible, infrared) measurements / 52.77.Bn – Etching and cleaning
© EDP Sciences, 2004
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.