Eur. Phys. J. Appl. Phys.
Volume 26, Number 3, June 2004
14th International Colloquium on Plasma Processes (CIP 2003)
|Page(s)||221 - 226|
|Section||Plasma, Discharges and Processes|
|Published online||11 May 2004|
Density of oxygen atoms in high pressure (10–50 torr) flowing microwave post-discharges for elastomer treatments
SME, Centre de recherches du Bouchet, rue Lavoisier, 91710 Vert Le
2 CPAT – UPS, 118 route de Narbonne, 31062 Toulouse Cedex, France
Corresponding author: email@example.com
Revised: 15 March 2004
Accepted: 30 March 2004
Published online: 11 May 2004
Results are presented on the production of oxygen atoms in flowing microwave post-discharges in a reactor of 5 litres at high pressures (10-50 torr). Diagnostics of O-atom densities are obtained by NO titration in the post-discharge. An hydrodynamic and kinetic model has been developed to obtain the spatial distribution of O-atoms inside the post-discharge reactor. Such post-discharge processes at high pressures are of interest for elastomer treatments.
PACS: 52.80.-s – Electric discharges / 52.70.Kz – Optical (ultraviolet, visible, infrared) measurements / 52.77.Bn – Etching and cleaning
© EDP Sciences, 2004
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