Analysis of local deformations in heterostructures containing short period superlattices by high-resolution transmission electron microscopy

¹ Instituto de Microelectrónica de Madrid, (IMM-CNM-CSIC) Isaac Newton 8, 28760 Tres Cantos, Madrid, Spain
² TECSEN, UMR-6122, Fac. Sciences St. Jérome, 13397 Marseille Cedex 20, France

Corresponding author: Carmen.Quintana@curie.u-psud.fr

Received: 15 April 2003
Revised: 19 September 2003
Accepted: 7 October 2003
Published online: 17 February 2004

Abstract

This work describes the application of the Lattice Fringe Spacing Measurement (LFSM) method to the study of complex multiquantum well heterostructures containing both low-misfit and strain compensated short period superlattices in barriers and wells, respectively. 90°-wedge cross-sectional samples have been used. The adequate choice of both experimental conditions and digitized sampling allows the whole heterostructure to be visualized and studied in a single High Resolution Transmission Electron Microscopy (HRTEM) image. Sample preparation and image processing technique are simple and inexpensive, resulting a fast procedure particularly suited for the analysis of large areas. By this way, in a single HRTEM image we have measured, in the growth direction, the lattice spacings at either side of the multiple grown interfaces as well as the period variations of both types of superlattices; in addition, we have measure on the same image the lattice strain in a direction perpendicular to the growth direction by using the LFSM and the Cumulative Sum methods. We have observed local lateral variations within the wells, with regions tensile or compressively strained, while a vestige of the grown SL remains, indicating the occurrence of a strain induced lateral composition modulation process spontaneously produced during the growth of strain compensated short-period superlattices. This is further confirmed in cross-section prepared by the tripod mechanical polisher method.