| Issue |
Eur. Phys. J. AP
Volume 21, Number 3, March 2003
|
|
|---|---|---|
| Page(s) | 213 - 223 | |
| Section | Imaging, Microscopy and Spectroscopy | |
| DOI | https://doi.org/10.1051/epjap:2003005 | |
| Published online | 27 February 2003 | |
https://doi.org/10.1051/epjap:2003005
Sputtering in a glow discharge lamp of the Grimm type
Spectroscopy Department, Physics Division, National Research Centre, Dokki,
Giza, Egypt
Corresponding author: khairiiggrais@hotmail.com
Received:
21
May
2002
Revised:
25
September
2002
Accepted:
24
October
2002
Published online:
27
February
2003
The sputtering rate (Q), in glow discharge, was measured as a
function of the discharge power (W). An empirical relation could be
obtained having the form 
, with the constants 
and m. The
equation was compared with theoretical derived equation of Takatsu and
Toda, which is based on the mechanism of momentum transfer. Takatsu
and Toda theoretical relationship had to be rearranged to obtain the same
relationship between the sputtering rate (Q) and the discharge (W). The
experimental data obtained in the present work as well as by Boumans
and Takatsu and Toda were analysed on the bases of the obtained equation.
This analysis revealed that the constants appearing in the Q-W equations
are pressure dependent. These dependences are described and discussed.
PACS: 52.80.Hc – Glow; corona / 81.15.Cd – Deposition by sputtering / 52.80.Yr – Discharges for spectral sources (including inductively coupled plasma)
© EDP Sciences, 2003
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