Eur. Phys. J. AP
Volume 21, Number 3, March 2003
|Page(s)||213 - 223|
|Section||Imaging, Microscopy and Spectroscopy|
|Published online||27 February 2003|
Sputtering in a glow discharge lamp of the Grimm type
Spectroscopy Department, Physics Division, National Research Centre, Dokki,
Corresponding author: email@example.com
Revised: 25 September 2002
Accepted: 24 October 2002
Published online: 27 February 2003
The sputtering rate (Q), in glow discharge, was measured as a function of the discharge power (W). An empirical relation could be obtained having the form , with the constants and m. The equation was compared with theoretical derived equation of Takatsu and Toda, which is based on the mechanism of momentum transfer. Takatsu and Toda theoretical relationship had to be rearranged to obtain the same relationship between the sputtering rate (Q) and the discharge (W). The experimental data obtained in the present work as well as by Boumans and Takatsu and Toda were analysed on the bases of the obtained equation. This analysis revealed that the constants appearing in the Q-W equations are pressure dependent. These dependences are described and discussed.
PACS: 52.80.Hc – Glow; corona / 81.15.Cd – Deposition by sputtering / 52.80.Yr – Discharges for spectral sources (including inductively coupled plasma)
© EDP Sciences, 2003
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