Issue |
Eur. Phys. J. AP
Volume 19, Number 3, September 2002
|
|
---|---|---|
Page(s) | 181 - 183 | |
Section | Organic Materials and Devices | |
DOI | https://doi.org/10.1051/epjap:2002064 | |
Published online | 12 September 2002 |
https://doi.org/10.1051/epjap:2002064
Dielectric properties of (Ba0.67Sr0.33)TiO3 thin film for uncooled infrared focal plane arrays
Department of Electronics Science and Technology, Huazhong University of
Science and Technology, Wuhan 430074, P.R. China
Corresponding author: Liu_Shijian@163.com
Received:
9
November
2001
Revised:
25
April
2002
Accepted:
27
June
2002
Published online:
12
September
2002
The (Ba0.67Sr0.33)TiO3 thin film for dielectric bolometer mode of uncooled infrared focal plane arrays prepared on Pt/Ti/SiO2/Si by radio-frequency magnetron sputtering has been investigated focusing on the dielectric properties. X-ray diffractometer shows the BST films to be well perovskite structure. These films exhibit good surface morphology. The dielectric properties of the BST thin films have been measured as a function of temperature using a HP4284A LCR meter. According to the dielectric constant-temperature curve, the Curie temperature of the BST thin film is about 30 °C, around room temperature. The maximum change in the dielectric constant is as large as 78/k, and more than 21% relative change in the dielectric constant has been obtained.
PACS: 77.55.+f – Dielectric thin films / 81.15.Cd – Deposition by sputtering
© EDP Sciences, 2002
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