Eur. Phys. J. AP
Volume 19, Number 3, September 2002
|Page(s)||181 - 183|
|Section||Organic Materials and Devices|
|Published online||12 September 2002|
Dielectric properties of (Ba0.67Sr0.33)TiO3 thin film for uncooled infrared focal plane arrays
Department of Electronics Science and Technology, Huazhong University of
Science and Technology, Wuhan 430074, P.R. China
Corresponding author: Liu_Shijian@163.com
Revised: 25 April 2002
Accepted: 27 June 2002
Published online: 12 September 2002
The (Ba0.67Sr0.33)TiO3 thin film for dielectric bolometer mode of uncooled infrared focal plane arrays prepared on Pt/Ti/SiO2/Si by radio-frequency magnetron sputtering has been investigated focusing on the dielectric properties. X-ray diffractometer shows the BST films to be well perovskite structure. These films exhibit good surface morphology. The dielectric properties of the BST thin films have been measured as a function of temperature using a HP4284A LCR meter. According to the dielectric constant-temperature curve, the Curie temperature of the BST thin film is about 30 °C, around room temperature. The maximum change in the dielectric constant is as large as 78/k, and more than 21% relative change in the dielectric constant has been obtained.
PACS: 77.55.+f – Dielectric thin films / 81.15.Cd – Deposition by sputtering
© EDP Sciences, 2002
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