Vacuum microelectronics devices based on the controlled electron motion in electric and magnetic fields

¹ Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, Ibaraki 305-8568, Japan
² Nagoya Institute of Technology, Department of Environmental Technology Gokiso-cho, Showa-ku, Nagoya 466, Japan

Corresponding author: ndan@etl.go.jp

Received: 27 October 1999
Accepted: 20 January 2000
Published online: 15 April 2000

Abstract

Several novel field emission devices are analyzed in a unitary way. The devices involve the use of field emitter arrays in a special configuration where the emitted electrons are subject to crossed electric and magnetic fields. Due to the acting electric and (magnetic) Lorentz forces, the electrons are either deviated or have a cycloid-like confined motion. The angular deviation of the electron trajectory can be used for measuring magnetic fields. The pulsed electron current produced by a cold cathode can be used to generate electromagnetic radiation. Because the electrons have a confined motion with a long trajectory length, their chance of hitting a residual gas molecule is increased. They can either excite gas molecules, which in turn emit UV-radiation when relaxing back to the stable state, or ionize them, the ionic current being correlated with the gas pressure. Accordingly, devices for generating UV-radiation and vacuum gauges can be devised. Furthermore, if the ion generation takes place in a narrow and well-defined region, then their angular deviation can be correlated with their mass. A mass spectrometer (with miniaturized dimensions and field emission electron source) can be devised on this principle.