Eur. Phys. J. AP
Volume 6, Number 3, June 1999
|Page(s)||251 - 255|
|Published online||15 June 1999|
Strain relaxation in buried strained layers by mixture of single and dipolar dislocation arrays
State Key Laboratory on Integrated Optoelectronics, Jilin University, Department of
Changchun 130023, P.R. China
Corresponding author: firstname.lastname@example.org
Revised: 22 March 1999
Accepted: 22 March 1999
Published online: 15 June 1999
The strain relaxation in buried strained layers is investigated using an elastic continuum model. The mixture of single dislocations residing at the substrate/strained layer interface (lower interface) and dipolar dislocations in which one is at the lower interface and the other at the strained layer/capping layer interface (upper interface), is proposed. In the mixture, the dislocation distributions are denoted by a parameter which is the ratio of the density of misfit dislocations at the upper interface to that at the lower interface. In a buried strained layer, relaxation of mean strain occurs by introduction of two orthogonal arrays of mixture of single and dipolar dislocations. Considering both the free surface and interactions between dislocations, the total elastic energy per unit area of buried strained layer containing two orthogonal arrays of mixture of single and dipolar dislocations is calculated. The energy is dependent on the misfit dislocation distributions. On energy minimization considerations, the expression of the misfit dislocation distributions in a buried strained layer with arbitrary strain relaxation and capping layer thickness is derived. It is demonstrated that the strain is initially relaxed by the single misfit dislocations and relaxed by the mixture of single and dipolar misfit dislocations in the final stage of strain relaxation in many buried layers of practical interest.
PACS: 68.55.Jk – Structure and morphology; thickness / 68.55.Ln – Defects and impurities: doping, implantation, distribution, concentration, etc. / 62.20.Dc – Elasticity, elastic constants
© EDP Sciences, 1999
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.