| Issue |
Eur. Phys. J. Appl. Phys.
Volume 47, Number 2, August 2009
11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI)
|
|
|---|---|---|
| Article Number | 22815 | |
| Number of page(s) | 4 | |
| Section | 11th International Symposium on High Pressure, Low Temperature Plasma Chemistry (HAKONE XI) | |
| DOI | https://doi.org/10.1051/epjap/2009062 | |
| Published online | 17 April 2009 | |
https://doi.org/10.1051/epjap/2009062
Electron beam induced light emission
1
Physik Department E12, Technische Universität München, James-Franck-Str. 1, 85748 Garching, Germany
2
Coherent GmbH, Zielstatt-Str. 32, 81379 München, Germany
Corresponding author: andreas.ulrich@ph.tum.de
Received:
11
December
2008
Accepted:
21
January
2009
Published online:
17
April
2009
Electron beams with a particle energy of typically 12 keV are used for collisional excitation of dense gases. The electrons are sent through ceramic membranes of only 300 nm thickness into gas targets. Excimer light emission from the pure rare gases and from gas mixtures are studied for the development of brilliant VUV and UV light sources. The application of the technology for gas kinetic studies is described and its potential for building very small electron beam pumped lasers is discussed.
PACS: 42.55.Lt – Gas lasers including excimer and metal-vapor lasers / 34.50.Fa – Electronic excitation and ionization of atoms / 33.20.Ni – Vacuum ultraviolet spectra
© EDP Sciences, 2009
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