The European Physical Journal - Applied Physics

Disordered Semiconductors: Physics and Applications

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Sensitivity of Germanium Content on Growth Conditions of Silicon-Germanium Nanoparticles Prepared in Nonthermal Capacitively-Coupled Plasmas

Received: 01 October 2019 / Revised: 04 March 2020 / Accepted: 16 April 2020
DOI: https://doi.org/10.1051/epjap/2020190302