The European Physical Journal Applied Physics (EPJ AP)

Effects of electron beam irradiation followed by thermal chlorine etching on InAs substrate

B. Akamatsu, P. Henoc, S. Miya and H. Sakaki

Eur. Phys. J. AP, 2 2 (1998) 151-155

Published online: 15 May 1998

DOI: 10.1051/epjap:1998178

B. Akamatsu

P. Henoc

S. Miya

H. Sakaki

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