The European Physical Journal Applied Physics (EPJ AP)

Investigation on optical and physico-chemical properties of LPCVD SiO_xN_y thin films

Bessem Kaghouche, Farida Mansour, Christine Molliet, Bernard Rousset and Pierre Temple-Boyer

Eur. Phys. J. Appl. Phys., 66 2 (2014) 20301

Published online: 05 June 2014

DOI: 10.1051/epjap/2014130550

Bessem Kaghouche

Farida Mansour

Christine Molliet

Bernard Rousset

Pierre Temple-Boyer

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