The European Physical Journal Applied Physics (EPJ AP)

Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition

Fabien Bénédic, Benoit Baudrillart and Jocelyn Achard

Eur. Phys. J. Appl. Phys., 81 1 (2018) 10804

Published online: 27 February 2018

DOI: 10.1051/epjap/2017170238

Fabien Bénédic

Benoit Baudrillart

Jocelyn Achard

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)