The European Physical Journal Applied Physics (EPJ AP)

Plasma etching of organic material: Combined effects of charged and neutral species

R. Murillo, F. Poncin-Epaillard and Y. Segui

Eur. Phys. J. Appl. Phys., 37 3 (2007) 299-305

Published online: 07 February 2007

DOI: 10.1051/epjap:2007031

R. Murillo

F. Poncin-Epaillard

Y. Segui

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