The European Physical Journal Applied Physics (EPJ AP)

Deposition of DLC:H films by C-sputtering assisted CH₄-Ar PE-CVD technique

K. Yokota, T. Nakatani and F. Miyashita

Eur. Phys. J. Appl. Phys., 39 1 (2007) 17-21

Published online: 28 June 2007

DOI: 10.1051/epjap:2007100

K. Yokota

T. Nakatani

F. Miyashita

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