The European Physical Journal Applied Physics (EPJ AP)

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne and V. Yegorenkov

Eur. Phys. J. Appl. Phys., 36 2 (2006) 177-182

Published online: 11 October 2006

DOI: 10.1051/epjap:2006116

V. Lisovskiy

J.-P. Booth

K. Landry

D. Douai

V. Cassagne

V. Yegorenkov

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