The European Physical Journal Applied Physics (EPJ AP)

Study of bulk micromachining for 〈100〉 silicon

K. Zandi, E. Arzi, N. Izadi, S. Mohajerzadeh, S. Haji, Y. Abdi and E. Asl Soleimani

Eur. Phys. J. Appl. Phys., 35 1 (2006) 7-12

Published online: 06 July 2006

DOI: 10.1051/epjap:2006072

K. Zandi

E. Arzi

N. Izadi

S. Mohajerzadeh

S. Haji

Y. Abdi

E. Asl Soleimani

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