The European Physical Journal Applied Physics (EPJ AP)

Density measurement of W thin films coating by combination of ion beam analysis and scanning electron microscopy

C. Wang, P. Brault and T. Sauvage

Eur. Phys. J. Appl. Phys., 31 1 (2005) 17-22

Published online: 14 April 2005

DOI: 10.1051/epjap:2005028

C. Wang

P. Brault

T. Sauvage

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