The European Physical Journal Applied Physics (EPJ AP)

Low temperature drive-in of surface-deposited copper in silicon wafers

M. L. Polignano, D. Caputo, C. Carpanese, G. Salvà and L. Vanzetti

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 435-438

Published online: 15 July 2004

DOI: 10.1051/epjap:2004138

M. L. Polignano

D. Caputo

C. Carpanese

G. Salvà

L. Vanzetti

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