AFM and XRD studies of GaAs surface after anisotropic etching N. L. Dmitruk, V. P. Kladko, R. V. Konakova and A. V. Karimov Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 407-409 Published online: 15 July 2004 DOI: 10.1051/epjap:2004119-8