The European Physical Journal Applied Physics (EPJ AP)

Investigation of silicon oxynitride and amorphous silicon multilayers

M. Serenyi and C. Frigeri

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 329-332

Published online: 15 July 2004

DOI: 10.1051/epjap:2004119-5

M. Serenyi

C. Frigeri

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