The European Physical Journal Applied Physics (EPJ AP)

Room-temperature diffusion of evaporated Fe atom into SOI materials characterized by scanning Kelvin-SPV method

S. Nakamura, H. Ikeda, D. Watanabe, M. Suhara and T. Okumura

Eur. Phys. J. Appl. Phys., 27 1-3 (2004) 487-489

Published online: 15 July 2004

DOI: 10.1051/epjap:2004119-11

S. Nakamura

H. Ikeda

D. Watanabe

M. Suhara

T. Okumura

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