The European Physical Journal Applied Physics (EPJ AP)

Integrated cooling devices in silicon technology

C. Perret, Y. Avenas, Ch. Gillot, J. Boussey and Ch. Schaeffer

Eur. Phys. J. AP, 18 2 (2002) 115-123

Published online: 15 May 2002

DOI: 10.1051/epjap:2002033

C. Perret

Y. Avenas

Ch. Gillot

J. Boussey

Ch. Schaeffer

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