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Comparative determination of the electron temperature in Ar- and N₂-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS

G. Crolly and H. Oechsner

Eur. Phys. J. AP, 15 1 (2001) 49-56

Published online: 15 July 2001

DOI: 10.1051/epjap:2001166

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