The European Physical Journal Applied Physics (EPJ AP)

Influence of particulates generated in a CH₄ low pressure radiofrequency discharge on dc negative self bias voltage

V. Massereau-Guilbaud, I. Géraud-Grenier and A. Plain

Eur. Phys. J. AP, 11 1 (2000) 71-76

Published online: 15 July 2000

DOI: 10.1051/epjap:2000146

V. Massereau-Guilbaud

I. Géraud-Grenier

A. Plain

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