The European Physical Journal Applied Physics (EPJ AP)

Effect of the hydrogen dilution on the local microstructure in hydrogenated amorphous silicon films deposited by radiofrequency magnetron sputtering

M. Daouahi, K. Zellama, H. Bouchriha and P. Elkaïm

Eur. Phys. J. AP, 10 3 (2000) 185-191

Published online: 15 June 2000

DOI: 10.1051/epjap:2000131

M. Daouahi

K. Zellama

H. Bouchriha

P. Elkaïm

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