The European Physical Journal Applied Physics (EPJ AP)

Thermodynamical study of the thermal nitridation for the system NH₃/monocristalline Si

Z. Sassi, J. C. Bureau and K. Chafik

Eur. Phys. J. AP, 7 3 (1999) 207-216

Published online: 15 September 1999

DOI: 10.1051/epjap:1999215

Z. Sassi

J. C. Bureau

K. Chafik

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