The European Physical Journal Applied Physics (EPJ AP)

Microscale friction investigation of polysilicon surface using scanning force microscopy

C. Flueraru, C. Cobianu, D. Dascalu and M. Flueraru

Eur. Phys. J. AP, 3 1 (1998) 29-33

Published online: 15 July 1998

DOI: 10.1051/epjap:1998200

C. Flueraru

C. Cobianu

D. Dascalu

M. Flueraru

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